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Gas Filter

Ceramic Gas Filter

This is the ceramic gas filter that has a feature as high accuracy filtration and high corrosion resistance. It is removed the particle in the gas piping system in the high level, and is achieved the high selectivity. (It can bake 200℃, and is decreased the H20 density to 5ppb or less.)

  • PGF Series: Honeycomb element, filtration accuracy: 0.003μm, recommended flow rate: 10 to 200L/min
  • PGFL Series: Honeycomb element, filtration accuracy: 0.003μm, recommended flow rate: 20 to 400L/min
  • UCF Series: Tube element, filtration accuracy: 0.01μm, recommended flow rate: 10 to 160L/min
  • SPC Series: Tube element, filtration accuracy: 0.003μm, recommended flow rate: 10L/min
  • UCH Series: Filtration Accuracy: 0.003μm, recommended Flow Rate40 to 200L/min
  • PGF-11 Series: Filtration Accuracy: 0.003μm, recommended Flow Rate500 to 3,000L/min

Metal Gas Filter

This is the high-efficiency gas filter for ULSI manufacture. SUS316L used for constructional material of filter, realizing high heat resistance with compact body and high filtration accuracy(460℃).

  • UCD Series: Disc element, filtration accuracy: 0.003μm, recommended flow rate: 10 to 100L/min
  • RGF Series: Tube element, filtration accuracy: 0.1 to 10μm, recommended flow rate: 40 to 60L/min
  • UCS Series: Tube element, filtration accuracy: 0.01μm, recommended flow rate: 10 to 80L/min
    *UCS Series was discontinued manufacture in October 2008.
  • UCS-M Series: Tube element, filtration accuracy: 0.003μm, recommended flow rate: 15 to 250L/min

HASTELLOY® Gas Filter

This filter is used HASTELLOY® for every part, and extremely lower pressure loss, compact size and realizing high gas flow rate.

  • UCH-M Series: Filtration accuracy: 0.003μm, recommended flow rate: 15 to 250L/min

PTFE Gas Filter

This is high corrosion resistance inline gas filter that PTFE used for element. Two-layer filtration film made of PTFE causing high efficiency filtration and low pressure loss, and it supplies the use point with gas without dropping the purity of the gas.

  • TF Series: Filtration accuracy: 0.01μm, recommended flow rate: 40 to 300L/min
    *TF-4 Series was discontinued manufacture in May 2017.
  • STF Series: Filtration accuracy: 0.003μm, recommended flow rate: 40 to 300L/min
    *STF-4 Series was discontinued manufacture in May 2017.
  • STF-3000 Series: Filtration accuracy: 0.003μm, recommended flow rate: 40 to 150L/min

Hybrid Filter